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| Temperature Dependence Model of Fundamental Natural Frequency for T-shaped Microcantilever |
| Dongsheng She, Xiaodong Wang, Liding Wang |
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Abstract In order to predict the dynamic mechanical properties of T-shaped
microcantilevers under different temperature environment, an
analytical model was presented in this paper. The lumped-mass method
was used to obtain the fundamental natural frequency of T-shaped
microcantilever. The analytical model was established by introducing
the temperature variable into the fundamental natural frequency
formula of T-shaped microcantilever. A dynamic measurement system
was developed to verify the established model. The fundamental
natural frequency was tested under the low temperature environment
ranging from room temperature down to $-55^{\circ}$C. The results
show that the fundamental natural frequencies of T-shaped
microcantilevers slightly and linearly increase with the decreased
environment temperature. The experimental results have a good
agreement with the predicted values calculated by the analytical
model.
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